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    Resonetics Micro-machining System with LumonicsExcimer Laser
 
Resonetics Micro-machining System
With Lumonics Excimer Laser
Resonetics Maestro 2000 Series

 		 


★ Applications:
Micro hole drilling
Selective polymer or thin metal removal
Blind holes or grooves
Micro stripping of insulation
Micro Milling (slots)
★ Energy distribution uniformity of +/- 5%
 		 
★ Proprietary fly-eye homogenizer
★ Standard 248 nm Optical Package with 4X demagnification.
(upgradable to a 5X through 35X, variable demagnification)


Lumonics 848I Excimer Laser
ArF
KrF
XeCl
XeF
Wavelength (nm)
193
248
308
351
Pulse Energy (mJ)
230
450
300
275
Average power (W)
30
80
50
45
Pulse Duration (ns) (FWHM)
12 - 2
Beam Dimensions (mm) (VxH) (FWHM)
8 - 12 x 25
Beam Divergence (mrad) (VxH, nominal)
1 x 3
Timing Jitter (ns)
±2